Introduction to Microelectromechanical (Mem) Microwave Systems,9780890062821

Introduction to Microelectromechanical (Mem) Microwave Systems

by
ISBN13: 9780890062821
ISBN10: 089006282X
Format: Hardcover
Pub. Date: 1999-06-01
Publisher(s): Artech House on Demand
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Summary

Deals the the emerging field of microelectro- mechanical systems (MEMS) fabrications and device technologies as applied to radio frequency (RF) and microwave wireless communications systems. DLC: Microwave devices.

Table of Contents

Preface xi
1 Microelectromechanical Systems
1(24)
1.1 MEMS Origins
1(2)
1.2 MEMS Impetus/Motivation
3(1)
1.3 MEMS Fabrication Technologies
4(13)
1.3.1 Conventional IC Fabrication Process
4(2)
1.3.2 Bulk Micromachining
6(2)
1.3.3 Surface Micromachining
8(4)
1.3.4 Fusion Bonding
12(1)
1.3.5 LIGA
13(4)
1.4 Exercises
17(4)
1.5 Summary
21(1)
References
21(4)
2 Fundamental MEMS Device Physics
25(32)
2.1 Actuation
25(10)
2.1.1 Parallel-Plate Capacitor
26(7)
2.1.2 Interdigitated "Comb-drive" Capacitor
33(2)
2.2 Mechanical Vibrations
35(6)
2.2.1 The Single-Degree-of-Freedom System
36(1)
2.2.2 The Many-Degrees-of-Freedom System
37(1)
2.2.3 Rayleigh's Method
38(3)
2.3 Computer-Aided Design of MEMS
41(7)
2.3.1 MEMS Materials and Fabrication Process Modeling
42(1)
2.3.2 Solid Modeling
43(1)
2.3.3 Numerical Simulation of MEMS
43(4)
2.3.4 Lumped-Parameter Modeling
47(1)
2.4 Exercises
48(3)
2.5 Summary
51(1)
References
52(5)
3 Fundamental MEMS Devices: The MEM Switch
57(24)
3.1 Introduction
57(1)
3.2 The Cantilever Beam MEM Switch
58(3)
3.3 MEM Switch Design Considerations
61(15)
3.3.1 Switch Specifications
61(3)
3.3.2 Microwave Considerations
64(6)
3.3.3 Material Considerations
70(5)
3.3.4 Mechanical Considerations
75(1)
3.4 Summary
76(1)
References
77(4)
4 Fundamental MEMS Devices: The MEM Resonator
81(26)
4.1 Introduction
81(1)
4.2 The Cantilever Beam MEM Resonator
82(1)
4.3 MEM Resonator Design Considerations
83(19)
4.3.1 Resonator Specifications
83(1)
4.3.2 Microwave Considerations
84(14)
4.3.3 Micromechanical Resonator Limitations
98(4)
4.4 Exercises
102(2)
4.5 Summary
104(1)
References
105(2)
5 Microwave MEMS Applications
107(52)
5.1 Introduction
107(1)
5.2 MEM Switches
108(21)
5.2.1 Coplanar Cantilever Beam MEM Switch Performance Analysis
108(2)
5.2.2 Series Cantilever Beam MEM Switch
110(4)
5.2.3 Shunt Cantilever Beam MEM Switch
114(7)
5.2.4 Membrane MEM Switch
121(4)
5.2.5 Side-Driven Mercury-Contacted MEM Switch
125(4)
5.3 Micromachining-Enhanced Planar Microwave Passive Elements
129(21)
5.3.1 Micromachined Transmission Lines
131(13)
5.3.2 Micromachining-Enhanced Lumped Elements
144(6)
5.4 MEM Resonators
150(4)
5.4.1 MEM Resonator Fabrication
151(3)
5.5 Summary
154(1)
References
155(4)
6 MEMS-Based Microwave Circuits and Systems
159(38)
6.1 Introduction
159(2)
6.2 Wireless Communications Systems
161(6)
6.2.1 Fundamentals of Wireless Communications
161(2)
6.2.2 Fundamentals of Satellite Communications
163(4)
6.3 MEMS-Based RF and Microwave Circuits
167(25)
6.3.1 Phase Shifters
167(1)
6.3.2 Resonators
168(4)
6.3.3 Filters
172(13)
6.3.4 Oscillators
185(5)
6.3.5 Mixers
190(1)
6.3.6 Packaging
191(1)
6.4 Summary
192(1)
References
193(4)
Appendix A: Surface Macromachining Process 197(10)
Glossary 207(2)
About the Author 209(2)
Index 211

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