MEMS Mechanical Sensors,9781580535366

MEMS Mechanical Sensors

by ; ; ;
ISBN13: 9781580535366
ISBN10: 1580535364
Format: Hardcover
Pub. Date: 2004-05-01
Publisher(s): Artech House on Demand
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Summary

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Table of Contents

Preface ix
CHAPTER 1 Introduction 1(6)
1.1 Motivation for the Book
1(1)
1.2 What Are MEMS?
2(1)
1.3 Mechanical Transducers
3(1)
1.4 Why Silicon?
4(1)
1.5 For Whom Is This Book Intended?
5(1)
References
5(2)
CHAPTER 2 Materials and Fabrication Techniques 7(32)
2.1 Introduction
7(1)
2.2 Materials
7(4)
2.2.1 Substrates
7(4)
2.2.2 Additive Materials
11(1)
2.3 Fabrication Techniques
11(25)
2.3.1 Deposition
12(5)
2.3.2 Lithography
17(4)
2.3.3 Etching
21(7)
2.3.4 Surface Micromachining
28(1)
2.3.5 Wafer Bonding
29(3)
2.3.6 Thick-Film Screen Printing
32(1)
2.3.7 Electroplating
33(1)
2.3.8 LIGA
34(1)
2.3.9 Porous Silicon
35(1)
2.3.10 Electrochemical Etch Stop
35(1)
2.3.11 Focused Ion Beam Etching and Deposition
36(1)
References
36(3)
CHAPTER 3 MEMS Simulation and Design Tools 39(18)
3.1 Introduction
39(1)
3.2 Simulation and Design Tools
40(16)
3.2.1 Behavioral Modeling Simulation Tools
40(3)
3.2.2 Finite Element Simulation Tools
43(13)
References
56(1)
CHAPTER 4 Mechanical Sensor Packaging 57(28)
4.1 Introduction
57(1)
4.2 Standard IC Packages
58(1)
4.2.1 Ceramic Packages
58(1)
4.2.2 Plastic Packages
59(1)
4.2.3 Metal Packages
59(1)
4.3 Packaging Processes
59(7)
4.3.1 Electrical Interconnects
60(3)
4.3.2 Methods of Die Attachment
63(2)
4.3.3 Sealing Techniques
65(1)
4.4 MEMS Mechanical Sensor Packaging
66(14)
4.4.1 Protection of the Sensor from Environmental Effects
67(4)
4.4.2 Protecting the Environment from the Sensor
71(1)
4.4.3 Mechanical Isolation of Sensor Chips
71(9)
4.5 Conclusions
80(1)
References
81(4)
CHAPTER 5 Mechanical Transduction Techniques 85(28)
5.1 Piezoresistivity
85(4)
5.2 Piezoelectricity
89(3)
5.3 Capacitive Techniques
92(2)
5.4 Optical Techniques
94(3)
5.4.1 Intensity
94(1)
5.4.2 Phase
95(1)
5.4.3 Wavelength
96(1)
5.4.4 Spatial Position
96(1)
5.4.5 Frequency
96(1)
5.4.6 Polarization
97(1)
5.5 Resonant Techniques
97(7)
5.5.1 Vibration Excitation and Detection Mechanisms
98(1)
5.5.2 Resonator Design Characteristics
99(5)
5.6 Actuation Techniques
104(5)
5.6.1 Electrostatic
104(3)
5.6.2 Piezoelectric
107(1)
5.6.3 Thermal
107(2)
5.6.4 Magnetic
109(1)
5.7 Smart Sensors
109(3)
References
112(1)
CHAPTER 6 Pressure Sensors 113(40)
6.1 Introduction
113(1)
6.2 Physics of Pressure Sensing
114(7)
6.2.1 Pressure Sensor Specifications
117(3)
6.2.2 Dynamic Pressure Sensing
120(1)
6.2.3 Pressure Sensor Types
121(1)
6.3 Traditional Pressure Sensors
121(2)
6.3.1 Manometer
121(1)
6.3.2 Aneroid Barometers
122(1)
6.3.3 Bourdon Tube
122(1)
6.3.4 Vacuum Sensors
123(1)
6.4 Diaphragm-Based Pressure Sensors
123(7)
6.4.1 Analysis of Small Deflection Diaphragm
125(2)
6.4.2 Medium Deflection Diaphragm Analysis
127(1)
6.4.3 Membrane Analysis
127(1)
6.4.4 Bossed Diaphragm Analysis
128(1)
6.4.5 Corrugated Diaphragms
129(1)
6.4.6 Traditional Diaphragm Transduction Mechanisms
129(1)
6.5 MEMS Technology Pressure Sensors
130(13)
6.5.1 Micromachined Silicon Diaphragms
130(2)
6.5.2 Piezoresistive Pressure Sensors
132(5)
6.5.3 Capacitive Pressure Sensors
137(2)
6.5.4 Resonant Pressure Sensors
139(3)
6.5.5 Other MEMS Pressure Sensing Techniques
142(1)
6.6 Microphones
143(2)
6.7 Conclusions
145(1)
References
145(8)
CHAPTER 7 Force and Torque Sensors 153(20)
7.1 Introduction
153(1)
7.2 Silicon-Based Devices
154(3)
7.3 Resonant and SAW Devices
157(2)
7.4 Optical Devices
159(1)
7.5 Capacitive Devices
160(2)
7.6 Magnetic Devices
162(2)
7.7 Atomic Force Microscope and Scanning Probes
164(2)
7.8 Tactile Sensors
166(2)
7.9 Future Devices
168(1)
References
168(5)
CHAPTER 8 Inertial Sensors 173(40)
8.1 Introduction
173(2)
8.2 Micromachined Accelerometer
175(20)
8.2.1 Principle of Operation
175(5)
8.2.2 Research Prototype Micromachined Accelerometers
180(12)
8.2.3 Commercial Micromachined Accelerometer
192(3)
8.3 Micromachined Gyroscopes
195(11)
8.3.1 Principle of Operation
195(4)
8.3.2 Research Prototypes
199(5)
8.3.3 Commercial Micromachined Gyroscopes
204(2)
8.4 Future Inertial Micromachined Sensors
206(1)
References
207(6)
CHAPTER 9 Flow Sensors 213(44)
9.1 Introduction to Microfluidics and Applications for Micro Flow Sensors
214(3)
9.2 Thermal Flow Sensors
217(12)
9.2.1 Research Devices
219(6)
9.2.2 Commercial Devices
225(4)
9.3 Pressure Difference Flow Sensors
229(3)
9.4 Force Transfer Flow Sensors
232(7)
9.4.1 Drag Force
232(3)
9.4.2 Lift Force
235(1)
9.4.3 Coriolis Force
236(2)
9.4.4 Static Turbine Flow Meter
238(1)
9.5 Nonthermal Time of Flight Flow Sensors
239(2)
9.5.1 Electrohydrodynamic
239(1)
9.5.2 Electrochemical
240(1)
9.6 Flow Sensor Based on the Faraday Principle
241(1)
9.7 Flow Sensor Based on the Periodic Flapping Motion
242(1)
9.8 Flow Imaging
243(2)
9.9 Optical Flow Measurement
245(2)
9.9.1 Fluid Velocity Measurement
245(1)
9.9.2 Particle Detection and Counting
246(1)
9.9.3 Multiphase Flow Detection
246(1)
9.10 Turbulent Flow Studies
247(1)
9.11 Conclusion
248(2)
References
250(7)
About the Authors 257(2)
Index 259

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