Dedication |
|
v | |
|
|
xi | |
|
|
xxv | |
Preface |
|
xxix | |
Acknowledgments |
|
xxxi | |
|
|
1 | (18) |
|
|
2 | (2) |
|
|
4 | (1) |
|
Typical manufacturing process |
|
|
4 | (1) |
|
|
5 | (1) |
|
|
6 | (5) |
|
High frequency characteristics |
|
|
6 | (3) |
|
Thermal stability (low thermal expansion, good thermal resistance) |
|
|
9 | (1) |
|
Integration of passive components |
|
|
10 | (1) |
|
Trends in materials developed by relevant companies |
|
|
11 | (1) |
|
|
12 | (7) |
|
|
16 | (3) |
|
Part 1 Material technology |
|
|
19 | (82) |
|
|
21 | (38) |
|
|
21 | (2) |
|
|
23 | (13) |
|
|
24 | (2) |
|
|
26 | (7) |
|
|
33 | (3) |
|
Reaction between glass and ceramic |
|
|
36 | (1) |
|
Dielectric characteristics |
|
|
36 | (6) |
|
|
36 | (5) |
|
|
41 | (1) |
|
|
42 | (3) |
|
|
45 | (9) |
|
Strengthening the glass phase |
|
|
47 | (4) |
|
|
51 | (3) |
|
|
54 | (5) |
|
|
55 | (4) |
|
|
59 | (24) |
|
|
59 | (2) |
|
Conductive paste materials |
|
|
61 | (1) |
|
Metallization methods for alumina ceramics |
|
|
62 | (4) |
|
|
62 | (1) |
|
High temperature process type (Mo-Mn method) |
|
|
62 | (1) |
|
Low temperature process type |
|
|
63 | (1) |
|
|
64 | (2) |
|
|
66 | (1) |
|
|
66 | (2) |
|
Suitability for co-sintering |
|
|
68 | (4) |
|
|
72 | (2) |
|
|
74 | (4) |
|
Bondability (solder wetability and wire bondability) |
|
|
78 | (5) |
|
|
79 | (4) |
|
Resistor materials and high K dielectric materials |
|
|
83 | (18) |
|
|
83 | (1) |
|
|
84 | (8) |
|
Ruthenium oxide/glass material |
|
|
87 | (2) |
|
The thermal stability of ruthenium oxide |
|
|
89 | (3) |
|
High K dielectric material |
|
|
92 | (9) |
|
Issues with low oxygen partial pressure atmosphere firing (point defects and semiconductor formation) |
|
|
93 | (5) |
|
|
98 | (3) |
|
Part 2 Process technology |
|
|
101 | (116) |
|
Powder preparation and mixing |
|
|
103 | (12) |
|
|
103 | (1) |
|
Inorganic ceramic materials |
|
|
104 | (1) |
|
|
105 | (10) |
|
|
106 | (2) |
|
|
108 | (2) |
|
Dispersing agent and dispersibility of slurry |
|
|
110 | (4) |
|
|
114 | (1) |
|
|
115 | (30) |
|
|
115 | (1) |
|
|
115 | (2) |
|
|
117 | (3) |
|
|
120 | (22) |
|
Characteristics required of green sheets |
|
|
120 | (1) |
|
Green sheet evaluation methods |
|
|
121 | (5) |
|
Various factors affecting the characteristics of green sheets |
|
|
126 | (10) |
|
Green sheet microstructure |
|
|
136 | (4) |
|
Green sheet dimensional stability |
|
|
140 | (2) |
|
|
142 | (3) |
|
|
143 | (2) |
|
|
145 | (22) |
|
|
145 | (7) |
|
Screen printing screen specifications |
|
|
147 | (1) |
|
Printing process conditions |
|
|
147 | (2) |
|
|
149 | (3) |
|
Green sheet characteristics |
|
|
152 | (1) |
|
|
152 | (2) |
|
|
154 | (13) |
|
Laminating process technologies |
|
|
154 | (3) |
|
Faults arising in the laminating process |
|
|
157 | (5) |
|
|
162 | (3) |
|
|
165 | (2) |
|
|
167 | (26) |
|
|
169 | (1) |
|
Controlling firing shrinkage |
|
|
169 | (5) |
|
Mismatches of firing behavior and firing shrinkage rate |
|
|
174 | (6) |
|
Achieving both antioxidation of the copper and elimination of binder |
|
|
180 | (9) |
|
|
189 | (1) |
|
Cofiring process and future LTCCs |
|
|
190 | (3) |
|
|
191 | (2) |
|
|
193 | (10) |
|
|
195 | (1) |
|
Thermal expansion and residual stress of LTCCs |
|
|
196 | (4) |
|
Thermal conductivity of LTCCs |
|
|
200 | (3) |
|
|
201 | (2) |
|
|
203 | (14) |
|
|
204 | (1) |
|
Technology development of LTCCs for the future |
|
|
204 | (6) |
|
Materials technology development |
|
|
208 | (2) |
|
|
210 | (1) |
|
Background of post-LTCC technology |
|
|
210 | (7) |
|
AD process as a post-LTCC technology |
|
|
|
Current and future state of development of AD ceramic film |
|
|
217 | (1) |
Acknowledgement |
|
217 | (2) |
References |
|
Index |
|
219 | |